CyberOptics Semiconductor to Feature Latest Vibration Monitoring Software, New Airborne Particle Sensor for Wafer-Processing Equipment at Semicon Japan

Top Quote CyberOptics Semiconductors ( will demonstrate the newest application of its wafer vibration monitoring software as well as a new Airborne Particle Sensor for wafer processing equipment during Semicon Japan in booth number 5B-512. End Quote
  • (1888PressRelease) November 13, 2010 - CyberOptics will also feature its full line of WaferSense wireless metrology devices at the international trade show scheduled for December 1-3 at the Makuhari Messe in Chiba, Japan

    With vibration tied to semiconductor process equipment failure, low yields and cycle times, CyberOptics' AVS 2.0 vibration monitoring software provides engineers the data they need to improve processes. Working in unison with our Auto Vibration System, the AVS 2.0 enables fab engineers to identify vibration anomalies during wafer processing by filtering out acceptable vibration frequencies produced by regular slow-moving equipment or high-frequency noises between 1 to 200 Hz. At Semicon Japan, CyperOptics will demonstrate the capabilities of the AVS 2.0 including new upgrades such as enhanced trace plotting (actual graphical data representation) that improves the visual analysis of data and data exportation capabilities that support third-party applications.

    A new Airborne Particle Sensor (APS), currently in development, is scheduled for demonstration during Semicon Japan. The patented particle-sensing technology monitors airborne particles in process equipment, reporting information in real-time to allow engineers to efficiently validate and analyze wafer contamination. By reducing the time and expense associated with process equipment particle qualification, the APS will help improves die yield and compress final wafer inspection.

    For more information on both the AVS 2.0 software and Airborne Particle Sensor, please refer to our web site at or contact sales at (503) 495-2200 for more information. You can also visit the company's Japanese language site at

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